A new technology for substrate stripping for fabricating vertical structure gallium nitride substrates is mass-produced. Recently, Shanghai Science and Technology Co., Ltd. based semiconductor die membered successfully developed for large-scale production of chemical corrosion technology peeling the epitaxial layer growth substrate can be used to produce led vertical structure GaN-based power devices and high-film structures Chip . This technology overcomes many shortcomings of laser stripping technology and solves problems such as product yield and cost that have plagued the industry for many years.

Large-scale mass production of substrate stripping technology for fabricating vertical structure gallium nitride substrates

It is reported that compared with laser stripping technology, Shanghai Core-based chemical stripping technology is simple in process and low in cost, suitable for mass production; avoiding laser energy and impact damage to the epitaxial layer during laser stripping; combined with MEMS technology, first Peeling and re-bonding completely releases the stress in the epitaxial structure of the device. The sapphire growth substrate after stripping can be reused, and the advantages are obvious, and it is more environmentally friendly.

It is understood that Shanghai Core Yuanji was founded in October 2014 by a senior LED industry expert with Dr. Hao Maosheng as the core. The company focuses on third-generation semiconductor (GaN) materials and high-end thin film structures with independent intellectual property rights and huge industry prospects. led chip development and production, has been completed from the growth substrate, epitaxial technology, chip technology, the layout of the device package Patent whole industry chain, breaking the monopoly of international giant art GaN-based thin-film electronics and the LED chip structure It is of great significance to the development of China's third-generation semiconductor materials technology. At present, the technology has been inquired by manufacturers.

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